Introduction to Micro and Nano Electromechanical Systems

Miniaturization technologies now have important roles in materials, mechanical and biomedical engineering, in addition to being the foundation for information technology. This course provides an introduction to MEMS/NEMS fabrication techniques, selected device applications, and the design tradeoffs in developing systems.
Please note: This course has an additional lab-fee for a required lab-kit that is used throughout the quarter. All students enrolled in this course will receive detailed information about it from the teaching team.
An undergraduate GPA of 3.3 or better.
The course schedule is displayed for planning purposes – courses can be modified, changed, or cancelled. Course availability will be considered finalized on the first day of open enrollment. For quarterly enrollment dates, please refer to our graduate education section.