Advanced VLSI Devices

In modern VLSI technologies, device electrical characteristics are sensitive to structural details and therefore to fabrication techniques. This course addresses the following questions: How are advanced VLSI devices designed and what future changes are likely? What are the implications for device electrical performance caused by fabrication techniques?

Topics Include

Physical models for nanometer scale structures
Control of electrical characteristics (threshold voltage, short channel effects, ballistic transport) in small structures
Alternative device structures for VLSI